Instrument Science and Engineering

• 	Name：CHEN, Di Title：Professor Dr. Office Phone：021-34206992 Email：dchen@sjtu.edu.cn Research Field：1. MEMS fabrication technique 2. microfluidics 3. Bio-MEMS 4. RF-MEMS
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• 	Name：Cai Ping Title：Professor Office Phone：34204003 Email：pcai@sjtu.edu.cn Research Field：Precision Engineering, Dynamic Measurement
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• 	Name：Chen Xin Title：Associate Professor Office Phone：021-34204624 Email：xchen.ie@sjtu.edu.cn Research Field：ultra-precision measurement, coordinate measurement
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